JPH0323923U - - Google Patents
Info
- Publication number
- JPH0323923U JPH0323923U JP8414789U JP8414789U JPH0323923U JP H0323923 U JPH0323923 U JP H0323923U JP 8414789 U JP8414789 U JP 8414789U JP 8414789 U JP8414789 U JP 8414789U JP H0323923 U JPH0323923 U JP H0323923U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- susceptor
- chemical vapor
- vapor phase
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 5
- 239000012808 vapor phase Substances 0.000 claims description 5
- 210000000078 claw Anatomy 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 230000003028 elevating effect Effects 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8414789U JPH0323923U (en]) | 1989-07-17 | 1989-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8414789U JPH0323923U (en]) | 1989-07-17 | 1989-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0323923U true JPH0323923U (en]) | 1991-03-12 |
Family
ID=31632392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8414789U Pending JPH0323923U (en]) | 1989-07-17 | 1989-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323923U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001118837A (ja) * | 1992-09-07 | 2001-04-27 | Mitsubishi Electric Corp | 半導体製造装置 |
-
1989
- 1989-07-17 JP JP8414789U patent/JPH0323923U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001118837A (ja) * | 1992-09-07 | 2001-04-27 | Mitsubishi Electric Corp | 半導体製造装置 |